EN
  • 5
    Ceramic Heater Ceramic Heater

    A ceramic heater is a component that heats the substrate to achieve the required process temperatu‥

  • 4
    GDP GDP

    GDP stands for Gas Distribution Plate and is also referred to as a showerhead or cathode. It is a ‥

  • 3
    ESC ESC

    An ESC is a component that holds the substrate using electrostatic force. The ceramic ESCs we main‥

  • 2
    Vacuum Chuck Vacuum Chuck

    A vacuum chuck is a component that holds the substrate using vacuum pressure. The ceramic vacuum c‥

  • 1
    Photo Chuck Photo Chuck

    A photo chuck is a component used in the photolithography process, where circuit patterns are tran‥