ESC
An ESC is a component that holds the substrate using electrostatic force. The ceramic ESCs we mainly supply are used in semiconductor etch-related processes such as CVD, PVD, and implant, as well as in display processes including laser cutting and OLEDoS deposition.
The main materials are AlN, Al2O3, and composite ceramics. We provide services including repair of end-of-life ESCs, manufacture of new spare parts, and modification of shape, structure, and patterns for equipment retrofitting or issue resolution.
Available Supply Types
|
Item |
Available Supply Types |
|
Process Application |
•Semiconductor etching processes:
CVD, PVD, Implant, TSV / Plasma dicing
•Display processes: OLED laser
cutting, OLEDos
deposition
|
|
Main Materials |
AlN Plate, Al2O3 Plate, Al2O3 Coating |
|
Product Types |
•Chucking mechanism: clamping
type, JR type
|
Main Supply Levels
|
Level |
Description |
Manufacturing Process (Standard) |
|
L1 |
Surface Treatment |
Incoming inspection → Grinding/Lapping/Polishing → Patterning → Final inspection → Cleaning + Assembly + Packaging |
|
L2 |
L1+Re-bonding |
Incoming inspection → Debonding → Used plate bonding → L1 process |
|
L3 |
L2+New dielectric layer |
Incoming inspection → Debonding → (Used plate bonding → Dielectric layer grinding) → New dielectric layer bonding → L1 process |
|
L4 |
L3+New Heater layer |
Incoming inspection → Debonding → (Individual heater layer bonding) → New plate bonding → L1 process |
|
New |
All New |
Plate fabrication → Final machining → Terminal joining (brazing/soldering, etc.) → (Individual heater layer bonding) → New plate bonding → L1 process |
Manufacturing Process
Product Image
