Ceramic Heater
A ceramic heater is a component that heats the substrate to achieve the required process temperature. The ceramic heaters we mainly supply are primarily used in semiconductor CVD processes.
The main material is AlN. We provide services including repair of end-of-life ceramic heaters, manufacture of new spare parts, and modification of shape, structure, and patterns for equipment retrofitting or issue resolution.
Available Supply Types
|
Item |
Available Supply Types |
|
Process Application |
•Semiconductor CVD process
|
|
Main Materials |
AlN |
|
Product Category |
•P-chuck & C-chuck
•AlN
Heater
|
Main Supply Levels
|
Level |
Description |
Manufacturing Process (Standard) |
|
L1 |
Surface Treatment |
Incoming inspection → Blast cleaning → Final inspection → Cleaning + Assembly + Packaging |
|
L2 |
L1+Re-pocket & Re-embossing |
Incoming inspection → Re-pocket machining → Patterning → L1 process |
|
L3 |
L2+Re-Brazing |
Incoming inspection → Re-pocket machining → New terminal joining (brazing) → Patterning → L1 process |
|
L4 |
L3+New dielectric layer (Crack Repair) |
Incoming inspection → Dielectric layer grinding → Lapping → New dielectric layer bonding (glass bonding) → Pocket machining → New terminal joining (brazing) → Patterning → L1 process |
|
New |
All New |
Plate (& shaft) fabrication → Plate & shaft joining → Final machining → New terminal joining (brazing) → Patterning → L1 process |
Product Image
