GDP
GDP stands for Gas Distribution Plate and is also referred to as a showerhead or cathode. It is a component that uniformly supplies process gas into the chamber. The CVD GDP and Y2O3 GDP that we mainly handle are primarily used in semiconductor dielectric etch processes.
We provide services including repair of end-of-life CVD GDP and Y2O3 GDP, manufacture of of New GDPs for spares, and modification of shape, structure, and patterns for equipment retrofitting or issue resolution.
Available Supply Types
|
Item |
Available Supply Types |
|
Process Application |
•Semiconductor dielectric etch
process
|
|
Main Materials |
CVD, Y2O3 |
Main Supply Levels
|
Level |
Description |
Manufacturing Process (Standard) |
|
L3 |
New Plate replacement |
Incoming inspection → Debonding → (Body upper/lower plate separation) → (Body repair) → (Body re-anodizing) → (Body upper/lower plate re-joining) → New plate bonding → Final inspection → Cleaning + Packaging |
|
New |
All New |
Plate & body fabrication → (Body upper/lower plate joining) → New plate bonding → Final inspection → Cleaning + Packaging |
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